Structure of image sensor module and a method for manufacturing of wafer level package

ABSTRACT

The present invention discloses an image sensor module and forming method of wafer level package. The image sensor module comprises an isolating base, a wafer level package, a lens holder, and a F.P.C.. The wafer level package having a plurality of image sensor dies and a plurality of solder balls is attached to the isolating base. A plurality of lens are placed in the lens holder, and the lens holder is located on the image sensor dies. The lens holder is placed in the F.P.C., and the F.P.C. has a plurality of solder joints coupled to the solder balls for conveniently transmitting signal of the image sensor dies. Moreover, the image sensor dies may be packaged with passive components or other dies with a side by side structure or a stacking structure.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to an image sensor module, and more particularlyto an image sensor module and a structure and method for manufacturingof wafer level package that can lower the cost, raise the yield andreliability.

2. Description of the Prior Art

The semiconductor technologies are developing very fast, and especiallysemiconductor dies have a tendency toward miniaturization. However, therequirements for the functions of the semiconductor dies have anopposite tendency to variety. Namely, the semiconductor dies must havemore I/O pads into a smaller area, so the density of the pins is raisedquickly. It causes the packaging for the semiconductor dies to becomemore difficult and decrease the yield.

The main purpose of the package structure is to protect the dies fromoutside damages. Furthermore, the heat generated by the dies must bediffused efficiently through the package structure to ensure theoperation the dies.

The earlier lead frame package technology is already not suitable forthe advanced semiconductor dies due to the density of the pins thereofis too high. Hence, a new package technology of BGA (Ball Grid Array)has been developed to satisfy the packaging requirement for the advancedsemiconductor dies. The BGA package has an advantage of that thespherical pins has a shorter pitch than that of the lead frame packageand the pins is hard to damage and deform. In addition, the shortersignal transmitting distance benefits to raise the operating frequencyto conform to the requirement of faster efficiency. Most of the packagetechnologies divide dies on a wafer into respective dies and then topackage and test the die respectively. Another package technology,called “Wafer Level Package (WLP)”, can package the dies on a waferbefore dividing the dies into respective dies. The WLP technology hassome advantages, such as a shorter producing cycle time, lower cost, andno need to under-fill or molding.

The dies are, such as image sensor dies. Now, the image sensor module isformed by using a method of COB or LCC. The one drawback of the methodof the COB is lower yield rate during packaging process due to particlecontamination on sensing area. Besides, the drawbacks of the method ofthe LCC are higher packaging cost due to materials and lower yield rateduring packaging process due to particle contamination on sensing area.Moreover, SHELL CASE company also develops wafer level packagetechnique, the image sensor dies packaged by the SHELL CASE is highercost due to requiring two glass plate and complicate process. And, thetransparency is bad due to epoxy wearing out, and the potentialreliability may be reduced.

Therefore, the present invention has been made in view of the aboveproblems in the prior arts, and it is an objective of the presentinvention to provide a new image sensor module.

SUMMARY OF THE INVENTION

Therefore, the present invention has been made in view of the aboveproblems in the prior arts, and it is an objective of the presentinvention to provide an image sensor module and a structure and methodfor manufacturing of wafer level package.

Another objective of the present invention is to provide an image sensormodule to conveniently make a final testing of the wafer level package.

Still objective of the present invention is to lower the cost of thepackage structure.

Still another objective of the present invention is to raise the yieldof the package structure.

Another objective of the present invention is to provide packagestructure with a high yield and reliability, and it can apply forsemiconductor industry and LCD industry.

As aforementioned, the present invention provides an image sensor moduleand a method for manufacturing of wafer level package. The image sensormodule comprises an isolating base, a wafer level package, a lensholder, and a F.P.C.. The wafer level package having a plurality ofimage sensor dies and a plurality of solder balls is attached to theisolating base. A plurality of lens are placed in the lens holder, andthe lens holder is located on the image sensor dies. The lens holder isplaced in the F.P.C., and the F.P.C. has a plurality of solder jointscoupled to the solder balls for conveniently transmitting signal of theimage sensor dies. Moreover, the image sensor dies may be packaged withpassive components or other dies with a side by side structure or astacking structure.

The present invention also provides a wafer level package structure. Thepackage structure comprises an isolating base, a first die and a seconddie, a first dielectric layer, a second dielectric layer, a contactconductive layer, an isolation layer and solder balls. The first die andsecond die are adhered to the isolating base. The first dielectric layeris formed on the isolating base and filled in a space except the firstdie and second die on the isolating base. The second dielectric layer isformed on the second die. The contact conductive layer is formed on afirst metal pad of the first die and a second metal pad of the seconddie to cover the first metal pad and second metal pad, and the contactconductive layer is electrically coupled to the first metal pad andsecond metal pad, respectively. The isolation layer is formed on thecontact conductive layer, and the isolation layer has openings formed onthe contact conductive layer. The solder balls are welded on theopenings and electrically coupled with the contact conductive layer,respectively. The first die is selected from DSP die, acctive die,passive die, supprot die, CPU die or processor die, and the second dieis a CMOS image sensor die. The image sensor die is packaged with theDSP die, acctive die, passive die, supprot die, CPU die or processor diewith a side by side structure.

The present invention also provides a wafer level package structure. Thepackage structure comprises an isolating base, a first die and a seconddie, a first dielectric layer, a second dielectric layer, a first andsecond contact conductive layer, an isolation layer and solder balls.The first die is adhered to the isolating base. The first dielectriclayer is formed on the isolating base and filled in a space except thefirst die on the isolating base. The first contact conductive layer isformed on a first metal pad of the first die to cover the first metalpad, and the first contact conductive layer is electrically coupled tothe first metal pad, respectively. The second die is adhered to thefirst die. The second dielectric layer is formed on the first dielectriclayer and filled in a space except the second die, and the seconddielectric layer has via hole formed on the first contact conductivelayer. The third dielectric layer is formed on the second die. Thesecond contact conductive layer is formed on a second metal pad of thesecond die and filled in said via hole to cover the second metal pad,and the second contact conductive layer is electrically coupled to thesecond metal pad and the first contact conductive layer. The isolationlayer is formed on the second contact conductive layer, and theisolation layer has openings formed on the second contact conductivelayer. The solder balls are welded on the openings and electricallycoupled with the second contact conductive layer, respectively. Thefirst die is selected from DSP die, acctive die, passive die, supprotdie, CPU die or processor die, and the second die is a CMOS image sensordie. The image sensor die is packaged with the DSP die, acctive die,passive die, supprot die, CPU die or processor die with a stackingstructure.

The present invention also provides a process of wafer level package.First, a first photo resist pattern is formed on metal pads of aplurality of dies on a wafer to cover the metal pads. A silicon-dioxidelayer is formed on the first photo resist pattern and the plurality ofdies. Then, the silicon-dioxide layer is cured. The first photo resistpattern is removed. The plurality of dies on the wafer is sawed to formindividual dies. Next, the good dies are selected and attached to aisolating base. The isolating base is cured. A material layer is formedon the isolating base to fill in a space among the plurality of dies onthe isolating base. The material layer is curied. A second dielectriclayer is formed on the material layer and the metal pads. After that, apartial region of the second dielectric layer on the metal pads isetched to form first openings on the metal pads. The second dielectriclayer is cured. A contact conductive layer is formed on the firstopenings to electrically couple with the metal pads, respectively. Asecond photo resist layer is formed on the second dielectric layer andthe contact conductive layer. Then, a partial region of the second photoresist layer is removed to form a second photo resist pattern and exposethe contact conductive layer to form second openings. The conductivelines are formed on the second photo resist pattern and the secondopenings and coupled with the contact conductive layer, respectively.The remaining second photo resist layer is removed. Following that, anisolation layer is formed on the conductive lines and the seconddielectric layer. A partial region of the isolation layer on theconductive lines is removed to form third openings. The isolation layeris cured. Finally, the solder balls are welded on the third openings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of an image sensor module according to thepresent invention;

FIG. 2 is a schematic diagram of a package with a side by side structureaccording to the present invention;

FIG. 3 is a schematic diagram of a package with a stacking structureaccording to the present invention;

FIG. 4A to FIG. 4J are schematic diagrams of a method for manufacturingof wafer level package according to the present invention;

FIG. 5 is a schematic diagram of a final testing of multi-CSP accordingto the present invention;

FIG. 6 is a schematic diagram of an application for LCD industryaccording to one embodiment of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENT

Some sample embodiments of the invention will now be described ingreater detail. Nevertheless, it should be recognized that the presentinvention can be practiced in a wide range of other embodiments besidesthose explicitly described, and the scope of the present invention isexpressly not limited expect as specified in the accompanying claims.

Then, the components of the different elements are not shown to scale.Some dimensions of the related components are exaggerated andmeaningless portions are not drawn to provide a more clear descriptionand comprehension of the present invention.

The die of the present invention may be packaged with passive components(ex. capacitors) or other dies with a side by side structure or astacking structure. The IC package can be finished by semiconductorindustry and LCD industry.

As aforementioned, the present invention provides an image sensormodule, as shown in FIG. 1. The cross-section of the wafer level packagestructure of the present is indicated as 101. The image sensor modulecomprises an isolating base 100, a wafer level package 101, a lensholder 102, and a F.P.C.103. The material of the isolating base 100 canbe glass, silicon, ceramic or quartz crystal materials etc., and evenhave a round or a rectangular shape. The wafer level package 101 has aplurality of image sensor dies 104 and the dies 105, for example digitalsignal process (DSP) dies, with a side by side structure. Note that thedies 105 are optionally disposed. The image sensor dies 104 may be CMOSimage sensor dies. The dies 105 are selected from DSP die, acctive die,passive die, supprot die, CPU die or processor die etc.. The imagesensor dies 104 and the dies 105 are packaged with a side by sidestructure. In the wafer level package 101, the image sensor dies 104 andthe dies 105 are adhered to the isolating base 100 by an UV curing typeand/or heat curing type adhesion material 106 with good thermalconductivity. The wafer level package 101 has a plurality of metalsoldering balls 107 to be a signal transmitting mechanism. The metalsoldering balls 107 may be solder balls 107.

A dielectric layer 108 is formed on the isolating base 100 and filled ina space except the image sensor dies 104 and the dies 105 on theisolating base 100. The material of the dielectric layer 108 may besilicon rubber.

A contact conductive layer 109 is formed on metal pads 115 of the imagesensor dies 104 and metal pads 116 of the dies 105 to cover the metalpads 115,116. That is to say, the contact conductive layer 109 may beelectrically coupled to the metal pads 115,116, respectively. Thematerial of the contact conductive layer 109 may be selected from Ni,Cu, Au and the combination thereof.

Moreover, a film layer 110 can be covered on the image sensor dies 104.The material of the film layer 110 is (SiO₂) or Al₂O₃ formed by spincoating to be a protection film. The thickness of the film layer 110 iscontrolled less preferably 20 μm so that it can't affect the function ofthe image sensor dies 104. The film layer 110 may comprise a filteringfilm 111, for example IR filtering layer, formed on the film layer 110to be a filter.

An isolation layer 112 is formed on the contact conductive layer 109,and the isolation layer 112 has openings on the contact conductive layer109. The isolation layer 112 should not cover the image sensor dies 104for conveniently sensing the image. The material of the isolation layer112 is selected from epoxy, resin and the combination thereof.

The lens holder 102 is located on the image sensor dies 104, and lens113,114 are placed in the lens holder 102. The lens holder 102 is placedin the F.P.C.103, and the F.P.C. 103 has a plurality of solder joints117 coupling to the solder balls 107 for conveniently transmittingsignal. Therefore, the combination of the lens holder 102 and theF.P.C.103 of the present invention has a function of probe card, and itcan be used to be a final testing of the Multi-CSP, as shown in FIG. 5.

As aforementioned, the present invention also provides a wafer levelpackage structure, as shown in FIG. 2. The package structure comprisesan isolating base 200, image sensor dies 201 and dies 202, a firstdielectric layer 205, a second dielectric layer 207, contact conductivelayer 206, an isolation layer 209 and solder balls 208. The material ofthe isolating base 200 can be glass, silicon, ceramic or quartz crystaletc., and even have a round or a rectangular shape. The image sensordies 201 and the dies 202 are packaged with a side by side structure.The image sensor dies 201 and the dies 202 are adhered to the isolatingbase 200 by an UV curing type and/or heat curing type adhesion material203 with good thermal conductivity. The first dielectric layer 205 isformed on the isolating base 200 and filled in a space except the imagesensor dies 201 and the dies 202 on the isolating base 200. The materialof the first dielectric layer 205 may be silicon rubber.

The second dielectric layer 207 is formed on the image sensor dies 201to cover a sensing area of the image sensor dies 201. The material ofthe second dielectric layer 207 is SiO₂ to be a protection film.Besides, a filtering film may be formed on the second dielectric layer207, and the filtering film is, for example IR filtering layer, to be afilter.

The contact conductive layer 206 is formed on metal pads 210 of theimage sensor dies 201 and metal pads 204 of the dies 202 to cover themetal pads 210,204. Namely, the contact conductive layer 206 may beelectrically coupled to the metal pads 210,204, respectively. Thematerial of the contact conductive layer 206 may be selected from Ni,Cu, Au and the combination thereof. The metal pads 210,204 are, forexample Al pads. The isolation layer 209 is formed on the contactconductive layer 206, and the isolation layer 209 has openings on thecontact conductive layer 206. The material of the isolation layer 209 isselected from epoxy, resin, SINR(Siloxane polymer) or BCB. The metalsoldering balls 208 are formed on the openings by welding method so thatthe metal soldering balls 208 are electrically coupled with the contactconductive layer 206, respectively. The metal soldering balls 208 may besolder balls 208.

The dies 202 may be selected from DSP die, acctive die, passive die,supprot die, CPU die or processor die, and the image sensor dies 201 areCMOS image sensor dies. The image sensor dies 201 are packaged with thedies 202 with a side by side structure.

Moreover, the present invention also provides an another wafer levelpackage structure, as shown in FIG. 3. The dies, in one embodiment, arepackaged with a stacking structure. The package structure comprises anisolating base 300, image sensor dies 301 and dies 302, a firstdielectric layer 303, a second dielectric layer 304, a third dielectriclayer 311, contact conductive layer 305 a,305 b, an isolation layer 306and solder balls 307. The material of the isolating base 300 is glass,silicon, ceramic or quartz crystal etc., and even has a round or arectangular shape. The image sensor dies 301 and the dies 302 arepackaged with a stacking structure. The dies 302 are adhered to theisolating base 300 by an UV curing type and/or heat curing type adhesionmaterial 310 a with good thermal conductivity. The first dielectriclayer 303 is formed on the isolating base 300 and filled in a spaceexcept the dies 302 on the isolating base 300. The material of the firstdielectric layer 303 may be silicon rubber.

The contact conductive layer 305 a is formed on metal pads 309 of thedies 302 to cover the metal pads 309 to electrically couple to the metalpads 309, respectively. The image sensor dies 301 are adhered to thedies 302 by an UV curing type and/or heat curing type adhesion material310 b with good thermal conductivity. The second dielectric layer 304 isformed on the first dielectric layer 303 and filled in a space exceptthe image sensor dies 301, and the second dielectric layer 304 has viahole 312 formed on the contact conductive layer 305 a. The material ofthe second dielectric layer 304 is SiO₂.

Besides, the third dielectric layer 311 is formed on the image sensordies 301 to cover a sensing area of the image sensor dies 301. However,the third dielectric layer 311 should not affect function of the imagesensor dies 301. The material of the third dielectric layer 311 is SiO₂to be a protection film. Specially, a filtering film may be formed onthe third dielectric layer 311 on the image sensor dies 301, and thefiltering film is, for example IR filtering layer, to be a filter.

The contact conductive layer 305 b is formed on metal pads 308 of theimage sensor dies 301 and filled in the via hole 312 to cover the metalpads 308. Namely, the contact conductive layer 305 b is electricallycoupled to the metal pads 308 and the contact conductive layer 305 a.The material of the contact conductive layer 305 a,305 b may be selectedfrom Ni, Cu, Au and the combination thereof. The metal pads 308,309 are,for example Al pads. The isolation layer 306 is formed on the contactconductive layer 305 b, and the isolation layer 306 has openings on thecontact conductive layer 305 b. The material of the isolation layer 306is selected from epoxy, resin and the combination thereof.

The metal soldering balls 307 are formed on the openings by weldingmethod so that the metal soldering balls 307 are electrically coupledwith the contact conductive layer 305 b, respectively. The metalsoldering balls 307 may be solder balls 307.

The dies 302 may be selected from DSP die, acctive die, passive die,supprot die, CPU die or processor die, and the image sensor dies 301 areCMOS image sensor dies. The image sensor dies 301 are packaged with thedies 202 with a stacking structure.

FIG. 4A to FIG. 4J are schematic diagrams of a method for manufacturingof wafer level package according to the present invention.

Moreover, the present invention provides a process of wafer levelpackage. First, a first photo resist pattern 402 is formed on metal pads401 of a plurality of dies 400 on a wafer to cover the metal pads 401,as shown in FIG. 4A. A first dielectric layer is formed on the firstphoto resist pattern 402 and the dies 400. Then, the first dielectriclayer is cured. The first photo resist pattern 402 is removed to form adielectric layer 403. The material of the dielectric layer 403 is SiO₂by spin coating method to be a protection film. The plurality of dies400 on the wafer is sawed along the sawing line 404 to form individualdies, as shown in FIG. 4B. Specially, a filtering film may be formed onthe dielectric layer 403, and the filtering film is, for example IRfiltering layer, to be a filter, as referring to above embodiment.

A step of back lapping the processed silicon wafer is used to get athickness of the wafer around 100–300 μm after the step of removingfirst photo resist pattern 402. The processed silicon wafer with theaforementioned thickness is easily sawed to divide the dies 400 on thewafer into respective dies. The back lapping step may be omitted if theprocessed silicon wafer is not hard to saw without back lapping. Thedies 400 comprise at least two types of dies.

Next, the divided dies are tested to choose standard good dies 400 therefrom. The standard good dies 400 are picked and replaced onto anisolating base 405 with a wider distance between two adjacent dies andadhered to the isolating base 405 with an UV curing type and/or heatcuring type adhesion material 406 with good thermal conductivity. Theisolating base 405 is cured by UV light or thermal, as shown in FIG. 4C.The adhesion material 406 is coating on the isolating base 405, and thethickness of the adhesion material 406 is preferably 20–60 μm. Thematerial of the isolating base 405 can be glass, silicon, ceramic,crystal materials etc., and even have a round or a rectangular shape.

The dies 400 have I/O pads 401 on the upper surface. The adhesivematerial 406 of the present invention is preferably good thermalconductive material, so the problems (such as stress) resulted from thetemperature difference between the dies 400 and the isolating base 405can be avoided.

A material layer 407 is formed on the isolating base 405 to fill in thespace among the die 400 and adjacent dies 400, and the surface of thematerial layer 407 and the surface of the die 400 are at same level, asshown in FIG. 4D. The material of the material layer 407 can be UVcuring type or heating curing type material. Then, the material layer407 is cured by UV or thermal. The material layer 407 may be formed by ascreen printing method or a photolithography method. The material layer407 functions as a buffer layer to reduce a stress due to temperature,etc. The material layer 407 can be an UV and/or heat curing material,such as silicon rubber, epoxy, resin, BCB, and so on.

A second dielectric layer is coated on the material layer 407 and metalpads 401. The material of the second dielectric layer can be SiO₂.

Then, the partial area of the second dielectric layer on the metal pads401 is removed by using a photo mask to form first openings 408 on themetal pads 401, and then the dielectric layer 409 is cured by UV orheating, as shown in FIG. 4E. Next, the plasma etching (RIE) can be usedoptionally to clean the surface of the metal pads 401 to make sure noresidual materials on the metal pads 401.

The contact conductive layer 410 is formed on the first openings 408 toelectrically couple with the metal pads 401 respectively, as shown inFIG. 4F. The preferable material of the contact conductive layer 410 isTi, Cu, or the combination thereof. The contact conductive layer 410 canbe formed by a physical method, a chemical method, or the combinationthereof, for example: CVD, PVD, sputter, and electroplating.

A second photo resist layer is formed on the dielectric layer 409 andthe contact conductive layer 410. And then, a partial region of thesecond photo resist layer is exposed and developed by using a photo maskto form a second photo resist pattern 411 and expose the contactconductive layer 410 to form second openings 412, as shown in FIG. 4G.

Then, conductive lines 413 by electroplating method are formed on thesecond openings 412 to couple with the contact conductive layer 413respectively, as shown in FIG. 4H. The material of the conductive lines413 are preferably Cu, Ni, Au, or the combination thereof. Theconductive lines 413 are called re-distribution layer (RDL).

The remaining second photo resist layer 411 is removed. An isolationlayer is formed on the conductive lines 413 and the dielectric layer409. A partial region of the isolation layer is removed to form aisolation layer 414 and third openings 415 on the conductive lines 413,as shown in FIG. 41. The isolation layer can be formed by a spin coatingmethod or a screen printing method.

The present invention may optionally comprises a step of forming anepoxy layer (not shown) on back surface of the isolating base 405.

The isolation layer 414 is cured. Solder balls 416 are formed on thethird openings 415, as shown in FIG. 4J. The solder balls 416 may beplaced on the third openings 415 by a screen printing method and thesolder balls 416 joined together with surfaces of the conductive lines413 by an IR reflow method.

Finally, the isolating base 405 is sawed along the sawing line 417 toseparate individual IC package.

Therefore, the image sensor module and wafer level package of thepresent invention can lower the cost of the package structure and raisethe yield of the package structure. Moreover, the package size of thepresent invention can be easily adjusted to test equipment, packageequipment, etc..

Moreover, the present invention can be applied for packaging ofsemiconductor equipment and for IC packaging of LCD equipment. FIG. 6 isa schematic diagram of an application for LCD industry according to oneembodiment of the present invention. The chip scale packages (CSP's) 601are formed on glass base 600.

Although specific embodiments have been illustrated and described, itwill be obvious to those skilled in the art that various modificationsmay be made without departing from what is intended to be limited solelyby the appended claims.

1. A image sensor module, comprising: an isolating base; an image sensordie having a plurality of solder balls, attached to said isolating base;a protection film formed on said image sensor die; a lens holder havinga plurality of lens, located on said image sensor die; and a F.P.C.having a plurality of conductive solder joints coupled to said solderballs for conveniently transmitting signal of said image sensor die,wherein said lens holder is placed in said F.P.C..
 2. The module inclaim 1, wherein said protection film is SiO₂ or Al₂O₃ formed by spincoating.
 3. The module in claim 1, wherein said image sensor modulecomprises a second die packaged with said image sensor die with a sideby side structure or a stacking structure.
 4. The module in claim 3,wherein said second die is selected from DSP die, acctive die, passivedie, supprot die, CPU die or processor die.
 5. The module in claim 1,wherein material of said isolating base is glass, silicon, ceramic orquartz crystal.
 6. The module in claim 3, further comprising; a firstdielectric layer formed on said isolating base and filled in a spaceexcept said image sensor die and said second die on said isolating base;a second dielectric layer formed on said second die; a contactconductive layer formed on a first metal pad of said image sensor dieand a second metal pad of said second die to cover said first metal padand second metal pad, said contact conductive layer electricallycoupling to said first metal pad and second metal pad, respectively; anisolation layer formed on said contact conductive layer, and saidisolation layer having openings on said contact conductive layer; andsolder balls welded on said openings and electrically coupling with saidcontact conductive layer, respectively.
 7. The module in claim 1,wherein said image sensor die is CMOS image sensor die.
 8. The module inclaim 1, further comprising a filtering film formed on said protectionfilm.
 9. The module in claim 6, wherein material of said firstdielectric layer is silicon rubber.
 10. The module in claim 6, whereinmaterial of said second dielectric layer is epoxy, SINR(Siloxanepolymer)or BCB.
 11. The module in claim 8, wherein said filtering filmia an IR filtering layer.
 12. The module in claim 6, wherein material ofsaid contact conductive layer is selected from Ni, Cu, Au and thecombination thereof.
 13. The module in claim 6, wherein material of saidisolation layer is selected from epoxy, resin, Silicon Rubber and thecombination thereof.
 14. The module in claim 3, further comprising; afirst dielectric layer formed on said isolating base and filled in aspace except said second die on said isolating base; a first contactconductive layer formed on a first metal pad of said second die toentirely cover said first metal pad, said first contact conductive layerelectrically coupling to said first metal pad; an image sensor diestacking and attaching to said second die; a second dielectric layerformed on said first dielectric layer and filled in a space except saidimage sensor die, said second dielectric layer having via hole formed onsaid first contact conductive layer; a third dielectric layer formed onsaid image sensor die; a second contact conductive layer formed on asecond metal pad of said image sensor die and filled in said via hole tocover said second metal pad, said second contact conductive layerelectrically coupling to said second metal pad and said first contactconductive layer; an isolation layer formed on said second contactconductive layer, and said isolation layer having openings on saidsecond contact conductive layer; and solder balls welded on saidopenings and electrically coupling with said second contact conductivelayer, respectively.
 15. The module in claim 14, wherein material ofsaid first dielectric layer is silicon rubber.
 16. The module in claim14, wherein material of said second dielectric layer is polyimide (PI),BT SINR, or epoxy.
 17. The module in claim 14, wherein material of saidsecond dielectric layer is polyimide (PI), BT or SINR(Siloxane polymer).18. The module in claim 14, wherein material of said first and secondcontact conductive layer is selected from Ni, Cu, Au and the combinationthereof.
 19. The module in claim 14, wherein material of said isolationlayer is selected from epoxy, resin and the combination thereof.